Semiconductor factory differential pressure sensor

The American Alpha differential pressure sensor is mainly used in the semiconductor field for high-precision environmental control and process monitoring:

• Cleanroom pressure difference management‌: Monitoring the tiny pressure differences (usually 0-100 Pa) between different cleanroom areas, maintaining unidirectional airflow to prevent contamination spread, and ensuring ISO 1-5 cleanliness levels;
• Etching and deposition process control‌: Real-time feedback on the pressure difference between the reaction chamber and the external atmosphere (such as 0-1 kPa), optimizing gas flow and vacuum degree, and ensuring uniformity of wafer surface treatment;
• Equipment health diagnosis‌: By detecting changes in pressure differences in gas pipelines or filtration systems, warning of blockages, leaks, etc., and reducing the risk of downtime.

Its characteristics (±0.5% FS accuracy, chemical corrosion resistance) can adapt to the strict environment of the semiconductor industry, directly improving yield and production stability, and is one of the key sensing components in intelligent manufacturing.